1.

Conference Proceedings
Conference Proceedings
1. Chemical Vapor Deposition of Boron Nitride Coatings on Moving Fibers
Joh, S. ; Evans, G.H.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.588-593,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
2.

Conference Proceedings
Conference Proceedings
2. Deposition of Titanium Nitride Films in a Stagnation Flow Reactor and Comparison With Model Predictions
Allendorf, M.D. ; Arsenlis, A. ; Bastasz, R. ; Evans, G.H. ; Larson, R.S. ; Schulberg, M.T.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.291-299,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
3.

Conference Proceedings
Conference Proceedings
3. Comparison Between Theory and Experiment for Large CVD Rotating Disk Reactors
Thompson, A.G. ; Zawadzki, P. ; Armour, E. ; Stall, R.A. ; Evans, G.H.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.101-106,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
4.

Conference Proceedings
Conference Proceedings
4. A Two-Dimensional Numerical Model of Gas Mixing and Deposition in a Rotating Disk CVD Reactor
Winters, W.S. ; Evans, G.H.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.89-94,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5