1.
Conference Proceedings
Joh, S. ; Evans, G.H.
Pub. info.:
Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition . pp.588-593, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-5
2.
Conference Proceedings
Allendorf, M.D. ; Arsenlis, A. ; Bastasz, R. ; Evans, G.H. ; Larson, R.S. ; Schulberg, M.T.
Pub. info.:
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing . pp.291-299, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-9
3.
Conference Proceedings
Thompson, A.G. ; Zawadzki, P. ; Armour, E. ; Stall, R.A. ; Evans, G.H.
Pub. info.:
Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition . pp.101-106, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-5
4.
Conference Proceedings
Winters, W.S. ; Evans, G.H.
Pub. info.:
Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition . pp.89-94, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-5