1.

Conference Proceedings

Conference Proceedings
Kubota, M. ; Ohkuni, M. ; Harafuji, K. ; Eriguchi, K. ; Tamaki, T. ; Nomura, N. ; Nakayama, I. ; Sivaram, S.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.111-118,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
2.

Conference Proceedings

Conference Proceedings
Niwa, M. ; Harada, Y. ; Yamamoto, K. ; Hayashi, S. ; Mitsuhashi, R. ; Eriguchi, K. ; Kubota, M. ; Hoshino, Y. ; Kido, Y ; Kwong, D.L.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.99-116,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11