1.

Conference Proceedings

Conference Proceedings
Eom, Dae-Hong ; Kim, Hyung-Joon ; Song, Hyung-Soo ; Park, Jin-Goo
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.201-211,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-26
2.

Conference Proceedings

Conference Proceedings
Eom, Dae-Hong ; Kim, Sang-Yong ; Lee, Kang-Kuk ; Kim, Ki-Sub ; Song, Hyung-Soo ; Park, Jin-Goo
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.288-295,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36