1.

Conference Proceedings
Conference Proceedings
1. THE EFFECT OF DILUTE CLEANING AND RINSING CHEMISTRIES ON TRANSITION METAL REMOVAL AND Si SURFACE MICROROUGHNESS
Chang, J.P. ; Sapjeta, J. ; Rosamilia, J.M. ; Boone, T. ; Eng, J., Jr. ; Opila, R.L. ; Brennan, S. ; Wiemer, C. ; Pianetta, P.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.17-24,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. ULTRAVIOLET LIGHT STIMULATED HALOGEN CHEMISTRY ON CLEANING SILICON SURFACES
Chang, J.P. ; Eng, J., Jr. ; Sapjeta, J. ; Opila, R.L. ; Cox, P. ; Pianetta, P.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.129-136,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
3.

Conference Proceedings
Conference Proceedings
3. High Performance, Highly Reliable Gate Oxide Formed with Rapid Thermal Oxidation In-Situ Steam Generation (ISSG) Technique
Ma, Y. ; Chen, Y.N. ; Brown, M.M ; Li, F. ; Chen, Y. ; Eng, J., Jr. ; Opila, R.L. ; Chabal, Y.J. ; Sapjeta, J. ; Muller, D.A. ; Xing, G.C. ; Trowbridge, T. ; Khau, M. ; Tam, N.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.179-186,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
4.

Conference Proceedings
Conference Proceedings
4. Silicon Surface Chemistry by IR Spectroscopy in the Mid- to Far-IR Region: H2O and Ethanol on Si(100)
Struck, L. M. ; Eng, J., Jr. ; Bent, B. E. ; Chabal, Y. J. ; Williams, G. P. ; White, A. E. ; Christman, S. ; Chaban, E. E. ; Raghavachari, K. ; Flynn, G. W. ; Radermacher, K. ; Mantl, S.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.395-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386