1.

Conference Proceedings
Conference Proceedings
1. A Robust Process for Ion Implant Annealing of SiC in a Low-Pressure Silane Ambient
Rao, S. ; Saddow, S.E. ; Bergamini, F. ; Nipoti, R. ; Emirov, Y. ; Agrawal, Anant
Pub. info.: Silicon carbide 2004--materials, processing and devices : symposium held April 14-15, 2004, San Francisco, California, U.S.A..  pp.229-234,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 815
2.

Conference Proceedings
Conference Proceedings
2. Using carbon nanotube cantilevers in scanning probe metrology
Schlaf, R. ; Emirov, Y. ; Bieber, J.A. ; Sikder, A. ; Kohlscheen, J. ; Walters, D.A. ; Islam, M.R. ; Metha, B. ; Ren, Z.F. ; Shofner, T.L. ; Rossie, B.B. ; Cresswell, M.W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.53-57,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689