1.

Conference Proceedings
Conference Proceedings
1. CAVITY FORMATION IN SIMOX STRUCTURES
El-Ghor, M. K. ; Pennycook, S. J. ; Sjoreen, T. P. ; White, C. W. ; Narayan, J.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.79-86,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
2.

Conference Proceedings
Conference Proceedings
2. OXYGEN ION IMPLANTATION INTO GERMANIUM
Sjoreen, T. P. ; Ravindra, N. M. ; El-Ghor, M. K. ; Fathy, D.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.137-140,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
3.

Conference Proceedings
Conference Proceedings
3. *DAMAGE GROWTH IN Si DURING SELF-ION IRRADIATION: A STUDY OF ION EFFECTS OEVER AN EXTENDED ENERGY RANGE
Holland, O. W. ; El-Ghor, M. K. ; White, C. W.
Pub. info.: Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A..  pp.169-178,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 147
4.

Conference Proceedings
Conference Proceedings
4. “EQUILIBRIUM OXIDE” FEATURES OF THE SIMOX PROCESS
Hosack, H. H. ; Hollingsworth, J. ; El-Ghor, M. K. ; Joyner, K. A.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.159-164,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
5.

Conference Proceedings
Conference Proceedings
5. EVOLUTION OF BURIED OXIDE “PIPE” DEFECTS UPON IMPLANTATION THROUGH PARTICLES IN SIMOX MATERIAL
El-Ghor, M. K. ; Joyner, K. A. ; Hosack, H. H.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.153-158,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
6.

Conference Proceedings
Conference Proceedings
6. EFFECT OF INTERMEDIATE THERMAL PROCESSING ON MICROSTRUCTURAL CHANGES OF OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL
Lee, J. D. ; Park, J. C. ; Krause, S. J. ; Roitman, P. ; El-Ghor, M. K.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.133-138,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
7.

Conference Proceedings
Conference Proceedings
7. SHALLOW JUNCTION FORMATION ;IN As-IMPLANTED Si BY LOW-TEMPERATURE RAPID THERMAL ANNEALING
El-Ghor, M. K. ; Pennycook, S. J. ; Zuhurm R. A.
Pub. info.: Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A..  pp.19-26,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 147