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Self-assembling growth of silicon nanostructures with micro shadow masks

Author(s):
Publication title:
Low dimensional structures prepared by epitaxial growth or regrowth on patterned substrates
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
298
Pub. Year:
1995
Page(from):
161
Page(to):
172
Pages:
12
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792336792 [0792336798]
Language:
English
Call no.:
N11482/298
Type:
Conference Proceedings

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