1.

Conference Proceedings
Conference Proceedings
1. SELECTIVE-AREA GROWTH OF METAL OXIDE FILMS INDUCED BY PATTERNED EXCIMER LASER SURFACE PHOTOLYSIS
Kunz, R. R. ; Ehrlich, D. J. ; Melngailis, J. ; Horn, M. W.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.105-110,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
2.

Conference Proceedings
Conference Proceedings
2. *OPTICAL CONSIDERATIONS FOR EXCIMER PROJECTION SYSTEMS
Rothschild, M. ; Ehrlich, D. J.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.13-20,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
3.

Conference Proceedings
Conference Proceedings
3. SPATIAL-RESOLUTION LIMITS OF LASER PATTERNING: SUBMICROMETER PROJECTION MICROCHEMISTRY
Ehrlich, D. J. ; Tsao, J. Y.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.195-202,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29
4.

Conference Proceedings
Conference Proceedings
4. ELECTROMAGNETICALLY-INDUCED SURFACE MICROSTRUCTURES AND ENHANCED FIELD EFFECTS IN LASER PROCESSING
Brueck, S. R. J. ; Ehrlich, D. J. ; Murphy, D. V. ; Tsao, J. Y.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.295-300,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29
5.

Conference Proceedings
Conference Proceedings
5. SUBMICROMETER-LINEWIDTH LASER DOPING
Tsao, J. Y. ; Ehrlich, D. J.
Pub. info.: Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.235-242,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 17
6.

Conference Proceedings
Conference Proceedings
6. RECENT ADVANCES IN UV LASER PHOTODEPOSITION
Tsao, J. Y. ; Ehrlich, D. J.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.115-126,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29
7.

Conference Proceedings
Conference Proceedings
7. LASER DIRECT WRITE TECHNOLOGIES AS TOOLS FOR GATE-ARRAY DEVELOPMENT
Silversmith, D. J. ; Ehrlich, D. J. ; Tsao, J. Y. ; Mountain, R. W. ; Sedlacek, J. H. C.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.55-60,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29
8.

Conference Proceedings
Conference Proceedings
8. SURFACE ELECTROMAGNETIC WAVES IN LASER MATERIAL INTERACTIONS
Ehrlich, D. J. ; Brueck, S. R. J. ; Tsao, J. Y
Pub. info.: Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.191-196,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 13
9.

Conference Proceedings
Conference Proceedings
9. New Photoresist Processes at UV Wavelengths Less Than 200 Nanometers
Ehrlich, D. J. ; Kunz, R. R. ; Hartney, M. A. ; Horn, M. W. ; Melngailis, J.
Pub. info.: Irradiation of polymeric materials : processes, mechanisms, and applications.  pp.266-,  1993.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 527