1.

Conference Proceedings
Conference Proceedings
1. Polysilicon Tensile Testing With Electrostatic Gripping
Sharpe, W. N., Jr. ; Turner, K. ; Edwards, R. L.
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.191-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
2.

Conference Proceedings
Conference Proceedings
2. Fracture Tests of Polysilicon Film
Sharpe, W. N., Jr. ; Yuan, B. ; Edwards, R. L.
Pub. info.: Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.51-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 505
3.

Conference Proceedings
Conference Proceedings
3. Determination of the Mechanical Properties of Polysilicon Thin Films Using Bulge Testing
Jayaraman, S. ; Edwards, R. L. ; Hemker, K. J.
Pub. info.: Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.623-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 505
4.

Conference Proceedings
Conference Proceedings
4. A New Technique for Measuring Poisson's Ratio of MEMS Materials
Sharpe, W. N., Jr. ; Vaidyanathan, K. R. ; Yuan, Bin ; Edwards, R. L.
Pub. info.: Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A..  pp.185-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 444