1.

Conference Proceedings

Conference Proceedings
Economou, D. ; Lymberopoulos, D.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.1-12,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
2.

Conference Proceedings

Conference Proceedings
Economou, D.
Pub. info.: Tutorials in electrochemical engineering - mathematical modeling : proceedings of the International Symposium.  pp.296-302,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-14
3.

Conference Proceedings

Conference Proceedings
Lymberopoulos, D. ; Wise, R. ; Economou, D.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.588-595,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
4.

Conference Proceedings

Conference Proceedings
Ramamurth, B. ; Economou, D.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.308-315,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
5.

Conference Proceedings

Conference Proceedings
Economou, D. ; Lymberopoulos, D.P.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.471-482,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6
6.

Conference Proceedings

Conference Proceedings
Johannes, J. ; Bartel, T. ; Hebner, G. ; Woodworth, J. ; Economou, D.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.20-38,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12