Micromachined devices and components II : 14-15 October 1996, Austin, Texas. pp.259-265, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.30-41, 1997. Bellingham. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.80-93, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California. pp.156-164, 1999. Bellingham, Washington. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering