1.

Conference Proceedings

Conference Proceedings
Eaglesham,D.J.
Pub. info.: Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California.  pp.2-7,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3882
2.

Conference Proceedings

Conference Proceedings
Michel,J. ; Kimerling,L.C. ; Benton,J.L. ; Eaglesham,D.J. ; Fitzgerald,E.A. ; Jacobson,D.C. ; Poate,J.M. ; Xie,Y.-H. ; Fer-rante,R.F.
Pub. info.: Proceedings of the 16th International Conference on Defects in Semiconductors : Lehigh University, Bethlehem, Pennsylvania, 22-26 July 1991.  Pt.2  pp.653-658,  1992.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 83-87
3.

Conference Proceedings

Conference Proceedings
Ma,Y. ; Lee,J.L. ; Benton,J.L. ; Boone,T. ; Eaglesham,D.J. ; Higashi,G.S.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.17-24,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3215
4.

Conference Proceedings

Conference Proceedings
Eaglesham,D.J.
Pub. info.: Microelectronic Device Technology III.  pp.2-7,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3881
5.

Conference Proceedings

Conference Proceedings
Eaglesham,D.J.
Pub. info.: Multilevel Interconnect Technology III.  pp.2-7,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3883
6.

Conference Proceedings

Conference Proceedings
Eaglesham,D.J.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.2-7,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884