1.

Conference Proceedings
Conference Proceedings
1. SiGe Selective Epitaxy: Morphology and Thickness Control for High Performance CMOS Technology
J.R. Holt ; E.C. Harley ; T.N. Adam ; S. Jeng ; K. Tabakman
Pub. info.: SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices.  pp.475-483,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(10)
2.

Conference Proceedings
Conference Proceedings
2. Effect of Ion Implantation and Anneals on Fully-strained SiC and SiC:P Films using Multiple Characterization Techniques
A. Madan ; J. Li ; Z. Ren ; B. Yang ; E.C. Harley
Pub. info.: SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices.  pp.325-332,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(10)