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Y. Liu ; E. Sugimata ; T. Matsukawa ; M. Masahara ; K. Endo ; I. Kenichi ; T. Shimizu ; H. Yamauchi ; S. Ouchi ; E. Suzuki
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Dielectrics for nanosystems II: materials science, processing, reliability, and manufacturing . pp.197-208, 2006. Pennington, N.J.. Electrochemical Society
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ECS transactions
Ser. no.:
2(1)
2.
Conference Proceedings
E. Suzuki ; Y. Liu ; K. Endo ; T. Matsukawa ; M. Masahara
Pub. info.:
ULSI process integration 5 . pp.339-348, 2007. Pennington, N.J.. Electrochemical Society
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ECS transactions
Ser. no.:
11(6)
3.
Conference Proceedings
E. Suzuki ; Y. Liu ; M. Mashara ; K. Ishii
Pub. info.:
Low temperature electronics and low temperature cofired ceramic based electronic devices : proceedings of the seventh International Symposium on Low Temperature Electronics and the International Symposium on Low Temperature Cofired CeramicBbased Electronic Devices . pp.16-29, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
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2003-27
4.
Conference Proceedings
K. Endo ; Y. Liu ; M. Masahara ; T. Maisukawa ; S. O'uchi ; E. Suzuki
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Silicon-on-insulator technology and devices 13 . pp.71-82, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
6(4)