Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia. pp.70250P-1-70250P-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia. pp.70250Q-1-70250Q-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia. pp.70250N-1-70250N-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering