Chittipeddi, S. ; Kelly, M. J. ; Dziuba, C. M. ; Irwin, R. B. ; Kahora, P. M. ; Kannan, V. C ; Cochran, W. T.
Pub. info.:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.387-392, 1992. Pittsburgh, Pa.. Materials Research Society