Fine, Stephen M. ; Dyer, Paul N. ; Norman, John A.T.
Pub. info.:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.329-334, 1993. Pittsburgh, Pa.. Materials Research Society
Minford, Eric ; Stevens, Robert E. ; Magnotta, Vincent L. ; Dyer, Paul N. ; Watkins, Thomas R. ; Green, David J.
Pub. info.:
Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.233-238, 1990. Pittsburgh, Pa.. Materials Research Society
Fine, Stephen M. ; Dyer, Paul N. ; Norman, John A.T. ; Muratore, Beth A. ; Iampietro, Robert L.
Pub. info.:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.415-420, 1991. Pittsburgh, Pa.. Materials Research Society