Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA. pp.254-259, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.225-235, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering