1.

Conference Proceedings
Conference Proceedings
1. Reliability Issues of Ultra Thin Silicon Nitride (a-SiN:H) by Hot Wire CVD for Deep Sub-Micron CMOS Technologies
Waghmare, P.C. ; Patil, S.B. ; Kumbhar, A. ; Dusane, R.O. ; Rao, Ramgopal
Pub. info.: Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001).  VOL-2  pp.1418-1420,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4746
2.

Conference Proceedings
Conference Proceedings
2. Gas Phase Chemistry Study During Deposition Of Amorphous And Microcrystalline Silicon Films By HWCVD Using Quadrupole Mass Spectrometry
Patil, Samadhan B. ; Kumbhar, Alka A. ; Dusane, R.O.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A..  pp.171-178,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 715