DeVeirman, A. ; Yallup, K. ; Van Landuyt, J. ; Maes, H. E. ; de Meyer, K. ; Dupas, L.
Pub. info.:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.129-132, 1988. Pittsburgh, Pa.. Materials Research Society
Gramenova, E. ; Jansen, Ph. ; Simoen, E. ; Vanhellemont, J. ; Dupas, L. ; Deferm, L.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.228-242, 1997. Pennington, NJ. Electrochemical Society