1.

Conference Proceedings
Conference Proceedings
1. Arrayed microcolumns for high throughput lithography
Hayden, P. ; Cummings, A. ; Gaynor, L. ; Murphy, N. ; O'Sullivan, G. ; Sheridan, P. ; Sokell, E. ; White, J. ; Dunne, P.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.340-348,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
2.

Conference Proceedings
Conference Proceedings
2. Investigation of EUV sources for 13.5-nm operation
Duffy, G. ; Cummings, A. ; Dunne, P. ; O'Sullivan, G.D.
Pub. info.: Opto-Ireland 2002: Optics and Photonics Technologies and Applications.  Part One  pp.533-540,  2003.  Belliengham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4876
3.

Conference Proceedings
Conference Proceedings
3. VUV and soft x-ray emission from pre-plasmas irradiated with picosecond and femtosecond pulses
Murphy, A. ; Hirsch, J.S. ; Kilbane, D. ; Kennedy, E.T. ; Khater, M.A. ; Mosnier, J.-P. ; Neogi, A. ; O'Sullivan, G.D. ; Lewis, C.L.S. ; Topping, S. ; Clarke, R.J. ; Divall, E.J. ; Foster, P. ; Hooker, C.J. ; Langley, A.J. ; Neely, D. ; Dunne, P. ; Costello, J.T.
Pub. info.: Opto-Ireland 2002: Optics and Photonics Technologies and Applications.  Part Two  pp.1196-1203,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4876
4.

Conference Proceedings
Conference Proceedings
4. EUV laser produced plasma source development for lithography (Invited Paper)
Hayden, P. ; Sheridan, P. ; O'Sullivan, G. ; Dunne, P. ; Gaynor, L. ; Murphy, N. ; Cummings, A.
Pub. info.: Opto-Ireland 2005: Optical Sensing and Spectroscopy.  pp.154-164,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5826
5.

Conference Proceedings
Conference Proceedings
5. Photoabsorption spectra of a laser produced Sn plasma
Lysaght, M. ; Kilbane, D. ; Cummings, A. ; Murphy, N. ; Dunne, P. ; O'Sullivan, G. ; Gaynor, L. ; Kampen, P. van ; Costello, J. T. ; Kennedy, E. T.
Pub. info.: Opto-Ireland 2005: Optical Sensing and Spectroscopy.  pp.273-280,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5826