1.

Conference Proceedings
Conference Proceedings
1. In Situ Diagnostics of Methane/Hydrogen Plasma Interactions With Si(100)
Duan, H. L. ; Bent, S. F.
Pub. info.: In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A..  pp.179-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 569
2.

Conference Proceedings
Conference Proceedings
2. Effect of Filament Material on the Decomposition of SiH4 in Hot Wire CVD of Si-Based Films
Duan, H. L. ; Zaharias, G.A. ; Bent, Stacey F.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A..  pp.21-30,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 715