1.

Conference Proceedings
Conference Proceedings
1. Understanding And Modeling Ramp Rate Effects On Shallow Junction Formations
Chakravarthi, Srinivasan ; Gencer, Alp H. ; Dunham, Scott T. ; Downey, Daniel F.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B4.8-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
2.

Conference Proceedings
Conference Proceedings
2. Rapid Thermal Process Requirements for the Annealling of Ultrashallow Junctions
Downey, Daniel F. ; Daryanani, Sonu L. ; Meloni, Marylou ; Brown, Kristen M. ; Felch, Susan B. ; Lee, Brian S. ; Marcus, Steven D. ; Gelpey, Jeff
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.299-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
3.

Conference Proceedings
Conference Proceedings
3. The Effects of Small Concentrations of Oxygen in RTP Annealing of Low Energy Boron, BF2 and Arsenic Ion Implants
Downey, Daniel F. ; Chow, Judy W. ; Lerch, Wilfried ; Niess, Juergen ; Marcus, Steven D.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.263-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
4.

Conference Proceedings
Conference Proceedings
4. Annealing Studies on Low Energy As+ and As2+ Implants
Srinivasa, Raghu ; Agarwal, Vikas ; Liu, Jinning ; Downey, Daniel F. ; Banerjee, Sanjay
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.257-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
5.

Conference Proceedings
Conference Proceedings
5. Defect Evolution From Low Energy, Amorphizing, Germanium Implants on Silicon
Gutierrez, Andres F. ; Jones, Kevin S. ; Downey, Daniel F.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669
6.

Conference Proceedings
Conference Proceedings
6. The Role Of Ge in Cluster Formation in B and BF2 Implanted Si Wafers After Ge Pre-Amorphization
Sahiner, M. Alper ; Magee, Charles W. ; Downey, Daniel F. ; Arevalo, Edwin ; Woicik, Joseph C.
Pub. info.: Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.301-308,  2004.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 792