Electrochemical technology applications in electronics : proceedings of the third international symposium. pp.188-196, 1999. Pennington, NJ. Electrochemical Society
Donepudi, V.S. ; Venkarachalapathy, R. ; Ozemoyah, P.O. ; Prakasli, J. ; Johnson, C.S.
Pub. info.:
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.6-14, 2000. Pennington, N.J.. Electrochemical Society