Mantl, S. ; Kappius, L. ; Antons, A. ; Loken, M. ; Klinkhammer, F. ; Dolle, M. ; Zhao, Q. T. ; Mesters, S. ; Buchal, Ch. ; Bay, H. L. ; Kabius, B. ; Trinkaus, H. ; Heinig, K. H.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.145-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Klinkhammer, F. ; Kappius, L. ; Antons, A. ; Dolle, M. ; Trinkaus, H. ; Mesters, St. ; Bochem, H-P. ; Mantl, S. ; Heinig, K-H.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.163-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Dolle, M. ; Mantl, S. ; Hacke, M. ; Mesters, St. ; Bay, H. L.
Pub. info.:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.549-, 1996. Pittsburgh. MRS - Materials Research Society