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32 results

Conference Proceedings

1. Micromachined scanner actuated by electromagnetic induction

Barbaroto, P.R. ; Ferreira, L.O.S. ; Doi, I.

Pub. info.:	Optomechatronic systems III : 12-14 November 2002, Stuttgart, Germany. pp.691-698, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4902

Conference Proceedings

2. Orientation-Dependent Anisotropic Etching Simulation in Silicon Wafer

Neli, R.R. ; Doi, I. ; Ribas, R.P. ; Diniz, J.A. ; Swart, J.W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium. pp.389-397, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-9

Conference Proceedings

3. Three-Color Detector for APS-CMOS Image Sensors Employing a Yriple Junction

Mestanza, S.N.M ; Manera, L.T. ; de Sousa, A.C.T ; Silva, I.F. ; Doi, I. ; Swart, J.W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium. pp.428-436, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-9

Conference Proceedings

4. Modeling and Simulation of Static Characteristics of a pMOS Coinpatihie Hot Wire Principle- Based Flow Micro-sensor

Junior, A.C.O. ; Doi, I. ; Diniz, J.A. ; Swart, J.W. ; Simocs, E.W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium. pp.437-444, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-9

Conference Proceedings

5. Silicon Oxynitride Gate-Dielectric Made by ECR Plasma Oxynitridation

Manera, G. A. ; Diniz, J. A. ; Moshkalyov, S. A. ; Lujan, G. S. ; Doi, I. ; Swart, J. W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.253-258, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-03

Conference Proceedings

6. Ultra-Thin Silicon Oxynitride Gate-Dielectric Made by ECR Plasmas

Manera, G.A. ; Diniz, J.A. ; Doi, I. ; Swart, J.W.

Pub. info.:	Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.216-221, 2004. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-01

Conference Proceedings

7. Microstructural Investigation of Porous Silicon Depth Profile by Direct Surface Force Microscopy

Chang, D. C. ; Baranauskas, V. ; Doi, I. ; Prohaska, T.

Pub. info.:	Surface/interface and stress effects in electronic material nanostructures : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.173-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	405

Conference Proceedings

8. A Comparative Analysis of Electrical Characteristics of Silicon Micro-Heaters for Thermal Transducers Applications

Oliveira, A. C. Jr., ; Doi, I. ; Diniz, J. A.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium. pp.363-371, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-08

Conference Proceedings

9. Characteristics of Polycrystalline Si1-xGex Alloy Deposited in a Vertical LPCVD System

Teixeira, R. C. ; Doi, I. ; Diniz, J. A. ; Swart, J. W. ; Zakia, M. B. P. ; dos Santos Filho, S. G.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.307-312, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-03

10.

Conference Proceedings

10. Control of Micron and Submicron Feature Dimensions in 2um Resolution Photolithographic System for MOS and MEMS Applications

Fioravante, N. P. Jr. ; Manera, L. T. ; Moshkalyov, S. A. ; Diniz, J. A. ; Tatsch, P. J. ; Grados, H. R. J. ; Doi, I. ; Swart, J. W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.369-374, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-03

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