1.

Conference Proceedings
Conference Proceedings
1. Electron beam metrology of 193-nm resists at ultralow voltage
Sullivan, N.T. ; Dixson, R. ; Bunday, B.D. ; Mastovich, M.E. ; Knutrud, P.C. ; Fabre, P. ; Brandom, R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.483-492,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. Traceable atomic force microscope dimensional metrology at NIST [6152-25]
Dixson, R. ; Orji, N. G. ; Fu, J. ; Cresswell, M. ; Allen, R. ; Guthrie, W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
3.

Conference Proceedings
Conference Proceedings
3. Progress on implementation of a CD-AFM・based reference measurement system [6152-24]
Orji, N. G. ; Martinez, A. ; Dixson, R. ; Allgair, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
4.

Conference Proceedings
Conference Proceedings
4. Reference metrology using a next-generation CD-AFM
Dixson, R. ; Guerry, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.633-646,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
5.

Conference Proceedings
Conference Proceedings
5. Determination of optimal parameters for CD-SEM measurement of line-edge roughness
Bunday, B.D. ; Bishop, M. ; McCormack, D.W., Jr. ; Villarrubia, J.S. ; Vladar, A.E. ; Dixson, R. ; Vorburger, T.V. ; Orji, N.G. ; Allgair, J.A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.515-533,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375