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Conference Proceedings

1. Silicon Oxynitride Gate-Dielectric Made by ECR Plasma Oxynitridation

Manera, G. A. ; Diniz, J. A. ; Moshkalyov, S. A. ; Lujan, G. S. ; Doi, I. ; Swart, J. W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.253-258, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-03

Conference Proceedings

2. Formation of Ultra-Thin Silicon Oxynitride Films by Low-Energy Nitrogen Implantation

Diniz, J. A. ; Tatsch, P. J. ; Kretly, L. C. ; Queiroz, J. E. C. ; Fo, J. Godoy

Pub. info.:	Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.249-, 1996. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	396

Conference Proceedings

3. Selective Etching of Polycrystalline Silicon in a Hexode Type Plasma Etcher

Vieira, R. ; Martarello, V. ; Moshkalyov, S. A. ; Diniz, J. A. ; Swart, J. W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.363-368, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-03

Conference Proceedings

4. Microwave Enhanced Silicon KOH Etching

Fischer, C. ; Diniz, J. A.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium. pp.408-415, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-08

Conference Proceedings

5. A Comparative Analysis of Electrical Characteristics of Silicon Micro-Heaters for Thermal Transducers Applications

Oliveira, A. C. Jr., ; Doi, I. ; Diniz, J. A.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium. pp.363-371, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-08

Conference Proceedings

6. Characteristics of Polycrystalline Si1-xGex Alloy Deposited in a Vertical LPCVD System

Teixeira, R. C. ; Doi, I. ; Diniz, J. A. ; Swart, J. W. ; Zakia, M. B. P. ; dos Santos Filho, S. G.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.307-312, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-03

Conference Proceedings

7. Electrical Characterization of Thin Gate Oxynitride Obtained by N+ Implantation into Polysilicon/ Thermal Oxide/ Silicon Structure

Toquetti, L. Z. ; dos Santos Filho, S. G. ; Diniz, J. A. ; Swart, J. W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.331-338, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-03

Conference Proceedings

8. Control of Micron and Submicron Feature Dimensions in 2um Resolution Photolithographic System for MOS and MEMS Applications

Fioravante, N. P. Jr. ; Manera, L. T. ; Moshkalyov, S. A. ; Diniz, J. A. ; Tatsch, P. J. ; Grados, H. R. J. ; Doi, I. ; Swart, J. W.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium. pp.369-374, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-03

Conference Proceedings

9. Process Optimization for Microbolometers Fabrication

Neli, R. R. ; Doi, I. ; Diniz, J. A.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium. pp.357-362, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-08

10.

Conference Proceedings

10. Silicon Oxide Sacrificial Layer for MEMS Applications

Biasotto, C. ; Boscoli, F. A. ; Teixeira, R. C. ; Ramos, A. C. S. ; Diniz, J. A. ; Daltrini, A. M. ; Moshkalyov, S. A. ; Doi, I.

Pub. info.:	Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium. pp.389-397, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-08

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Author: Diniz, J. A.