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Conference Proceedings

1. Patterning of diamond films by RIE and its MEMS applications

Ding,G. ; Yao,J. ; Yu,A. ; Zhao,X. ; Wang,L. ; Shen,T.

Pub. info.:	Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.451-461, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4174

Conference Proceedings

2. Dynamic actuation behavior of NiTi/Si diaphragm micropump

Xu,D. ; Wang,L. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Cheng,X. ; Chen,J. ; Cai,B.

Pub. info.:	Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.324-330, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4174

Conference Proceedings

3. Orthogonal method for processing of SU-8 resist in UV-LIGA

Liu,J. ; Zhu,J. ; Ding,G. ; Zhao,X. ; Cai,B.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.462-466, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

4. Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant

Ding,G. ; Yu,A. ; Zhao,X. ; Xu,D. ; Cai,B. ; Shen,T.

Pub. info.:	Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.340-345, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3892

Conference Proceedings

5. DEM technique:a new three-dimensional microfabrication technique for nonsilicon materials

Chen,D. ; Zhang,D. ; Ding,G. ; Zhao,X. ; Zhang,J. ; Yang,C. ; Cai,B.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.1099-1104, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

6. CVD diamond microhinge for MOEMS applications

Ding,G. ; Zhao,X. ; Yao,X. ; Shen,T.

Pub. info.:	Instruments for optics and optoelectronic inspection and control, 8-10 November 2000, Beijing, China. pp.61-64, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4223

Conference Proceedings

7. PMMA deep etching by O2RIE

Yu,A. ; Ding,G. ; Guo,X. ; Li,C. ; Mao,H. ; Ni,Z.

Pub. info.:	Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings. pp.852-855, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4086

Conference Proceedings

8. Novel micropump actuated by thin film shape memory alloy

Xu,D. ; Cai,B. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Wang,L. ; Zhao,X.

Pub. info.:	Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.369-375, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3891

Conference Proceedings

9. Fabrication of stator winding of electromagnetic micromotor with 1-mm diameter

Zhao,X. ; Yang,C. ; Ding,G. ; Zhang,M.

Pub. info.:	Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.352-358, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3891

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Conference Proceedings

10. Wafer-bonding technology and its applications in optoelectronic devices

Zhu,Z. ; Ding,G. ; Chen,K. ; Ejeckam,F.E. ; Qian,Y. ; Christenson,G.L. ; Lo,Y.-H.

Pub. info.:	Integrated Optoelectronics. pp.147-158, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2891

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