1.

Conference Proceedings
Conference Proceedings
1. 59 Strain Effects on Transient Enhanced Diffusion and Deactivation of Arsenic Implanted in Silicon
Dilliway, G. D. M. ; Smith, A. J. ; Hamilton, J. J. ; Xu, L. ; McNally, P. J. ; Cooke, G. ; Kheyrandish, H. ; Cowern, N. E. B.
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.497-504,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
2.

Conference Proceedings
Conference Proceedings
2. Characterization of morphology and defects in silicon-germanium virtual substrates
Dilliway, G. D. M. ; Willoughby, A. F. W. ; Bonar, J. M.
Pub. info.: Morphological and compositional evolution of heteroepitaxial semiconductor thin films : symposium held April 24-27, 2000, San Francisco, California.  pp.265-,  2000.  Warrendale, Pennsylvania..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 618