1.

Conference Proceedings
Conference Proceedings
1. * Analysis of Pinmark Induced Defects after RTP
Niess, J. ; Dietl, W. ; Altug, O. ; Lerch, W. ; Geiler, H.D. ; Karge, H.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.79-86,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
2.

Conference Proceedings
Conference Proceedings
2. Nitrogen Profile and Electrical Properties of Reoxidized Thermally Grown Silicon Nitride
Ludsteck, A, ; Schulze, J. ; Eisele, I. ; Dietl, W. ; Chung, H. ; Nenyei, Z. ; Bergmaier, A. ; Dollinger, G.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.232-241,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01