1.

Conference Proceedings
Conference Proceedings
1. LASER ACTIVATED GLASS FLOW MODELING
Aronowitz, S. ; Delfino, M.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.479-486,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
2.

Conference Proceedings
Conference Proceedings
2. CHANELLING EFFECTIN BORON AND BORON MOLECULAR ION-IMPLANTATION
Delfino, M. ; Paine, B. M.
Pub. info.: Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.529-532,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 35
3.

Conference Proceedings
Conference Proceedings
3. DONOR CREATION DURING OXYGEN IMPLANTED BURIED OXIDE FORMATION
Delfino, M. ; Chu, P.K.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.245-250,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53
4.

Conference Proceedings
Conference Proceedings
4. HIGH DOSE IMPLANTATION OF NICKEL INTO SILICON
Campisi, G.J. ; Dietrich, H.B. ; Delfino, M. ; Sadana, D.K.
Pub. info.: Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA.  pp.747-752,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 54