1.

Conference Proceedings
Conference Proceedings
1. Screening the High-k Layer Quality by Means of Open Circuit Potential Analysis and Wet Chemical Etching
Claes, Martine ; Gendt, Stefan De ; Witters, Thomas ; Kaushik, Vidya ; Chen, Jerry ; Conard, Thierry ; Delabie, Annelies ; Elshocht, Sven Van ; Heyns, Marc
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.15-22,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745
2.

Conference Proceedings
Conference Proceedings
2. ALD HfO2 Surface Preparation Study
Delabie, Annelies ; Caymax, M. ; Maes, J.W. ; Bajolet, P. ; Brijs, B. ; Cartier, E. ; Conard, T. ; Gendt, S.De ; Richard, O. ; Vandervorst, W. ; Zhao, C. ; Green, M. ; Tsai, W. ; Heyns, M.M.
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.179-184,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745