1.

Conference Proceedings
Conference Proceedings
1. Precise Characterization of Resists and Thin Gate Dielectrics in the VUV Range for 157nm Lithography
Boher, Pierre ; Evrard, Patrick ; Piel, Jean Philippe ; Defranoux, Christophe ; Stehle, Jean Louis
Pub. info.: Nonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics : symposium held November 26-December 1, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 636
2.

Conference Proceedings
Conference Proceedings
2. Precise Characterization of Silicon on Insulator (SOI) and Strained Silicon on Si1-xGex on Insulator (SSOI) Stacks With Spectroscopic Ellipsometry
Sun, Lianchao ; Fouere, Jean-Claude ; Defranoux, Christophe ; Heinrich, Patrice ; Reis, Christine Dos ; Emeraud, Thierry ; Piel, Jean-Philippe ; Stehle, Jean-Louis
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.103-108,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786