1.

Conference Proceedings
Conference Proceedings
1. 19 Ultra-shallow junction formation by Gas Immersion Laser Doping (GILD) on silicon bulk and SOI substrate
Hernandez, M. ; Sarnet, T. ; Debarre, D. ; Boulmer, J. ; Kerrien, G. ; Laviron, C. ; Semeria, M N.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.145-154,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
2.

Conference Proceedings
Conference Proceedings
2. Intraband absorption in Ge/Si self-assembled quantum dots
Boucaud, P. ; Thanh, V. Le ; Sauvage, S. ; Brunhes, T. ; Fortuna, F. ; Debarre, D. ; Bouchier, D.
Pub. info.: Semiconductor quantum dots : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.9-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 571
3.

Conference Proceedings
Conference Proceedings
3. Self-Assembled Ge Quantum Dots on SiC Substrates Grown by UHV-CVD
Calmes, C. ; Thanh, V.Le ; Bouchier, D. ; Saddow, S.E. ; Yam, V. ; Debarre, D. ; Laval, R. ; Clerc, C.
Pub. info.: Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.143-150,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 742
4.

Conference Proceedings
Conference Proceedings
4. Improved resolution of submicron KrF laser ablation of polymers by a new filtered imaging irradiation
Lazare, S. ; Weisbuch, F. ; Tokarev, V. ; Debarre, D.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.249-254,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
5.

Conference Proceedings
Conference Proceedings
5. Experiment and Modelization Results on Laser Thermal Processing for Ultra-Shallow Junction Formation: Influence of Laser Pulse Duration
Venturini, J. ; Hernandez, M. ; Zahorski, D. ; Kerrien, G. ; Sarnet, T. ; Debarre, D. ; Boulmer, J. ; Laviron, C. ; Semeria, M. -N. ; Camel, D. ; Santailler, J. -L.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.255-260,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
6.

Conference Proceedings
Conference Proceedings
6. Single-Shot Excimer Laser Annealing and In Process Ellipsometry Analysis for Ultra Shallow Junctions
Noguchi, T. ; Kerrien, G. ; Sarnet, T . ; Debarre, D. ; Boulmer, J. ; Zahorski, D. ; Hernandez, M. ; Defranoux, C. ; Laviron, C. ; Semeria, M.-N.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.33-38,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
7.

Conference Proceedings
Conference Proceedings
7. Laser doping for microelectronics and microtechnology
Sarnet, T. ; Kerrien, G. ; Yaakoubi, N. ; Bosseboeuf, A. ; Dufour-Gergam, E. ; Debarre, D. ; Boulmer, J. ; Kakushima, K. ; Laviron, C. ; Hernandez, M. ; Venturini, J. ; Bourouina, T.
Pub. info.: High-Power Laser Ablation V.  pp.669-680,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5448