1.

Conference Proceedings

Conference Proceedings
Amblard, G. R. ; Zandbergen, P. ; McCallum, M. ; Stephen, A. ; Byers, J. D. ; Dean, K. R. ; Meute, J. ; Nelson, C. M.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.810-827,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings

Conference Proceedings
Stephen, A. ; Dean, K. R. ; Byers, I. D.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.1315-1322,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
3.

Conference Proceedings

Conference Proceedings
Dean, K. R. ; Gonsalves, K. E. ; Thiyagarajan, M.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61531E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153