Lee, B. ; Gan, T. ; Boning, D.S. ; David, J. ; Bonner, B.A. ; McKeever, P. ; Osterheld, T.H.
Pub. info.:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D11.8/E8.8-, 2001. Warrendale, PA. Materials Research Society
Bonner, B.A. ; Fishkin, B. ; David, J. ; Garretson, C. ; Osterheld, T.H.
Pub. info.:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D11.6/E8.6-, 2001. Warrendale, PA. Materials Research Society