1.

Conference Proceedings
Conference Proceedings
1. IMAGING VLSI CROSS SECTIONS BY ATOMIC FORCE MICROSCOPY
Neubauer, Gabi ; Lawrence, M. ; Dass, A. ; Johnson, Thad J.
Pub. info.: Materials reliability in microelectronics II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.283-288,  1992.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 265
2.

Conference Proceedings
Conference Proceedings
2. PARTICLE MONITORING IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION BPSG FILMS
Li, J. ; Moinpour, M. ; Fardi, B. ; Lee, J. ; Thach, D. ; Lawrence, M. ; Dass, A. ; Moghadam, F.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III.  pp.31-39,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-9
3.

Conference Proceedings
Conference Proceedings
3. IDENTIFICATION OF W20O58 PHASE IN CVD TUNGSTEN FILMS
Lawrence, M. ; Dass, A. ; Sivaram, Siva ; Tracy, Bryan
Pub. info.: Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.185-192,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 168