Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.453-461, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India. pp.248-252, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom. pp.134-139, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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