1.

Conference Proceedings
Conference Proceedings
1. Optimization of EDP solutions for feature-size-independent silicon etching
Bhat,K.N. ; Yellempalle,C. ; DasGupta,N. ; DasGupta,A. ; Rao,P.R.
Pub. info.: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.453-461,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4557
2.

Conference Proceedings
Conference Proceedings
2. Pressure-assisted fusion bonding of silicon wafers
Deepa Nair,J.S. ; Prabhu,D. ; Rao,P.R.S. ; DasGupta,A. ; Karmalkar,S. ; DasGupta,N. ; Bhat,K.N.
Pub. info.: Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India.  pp.248-252,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3321
3.

Conference Proceedings
Conference Proceedings
3. Passive coupling of InGaAs/InP p-i-n detector and single-mode fiber using InP bulk micromachining
DasGupta,N. ; Kumar,V.Naveen ; Kishore,K.V.S.R. ; Kumar,T.I. ; Sankaralingam,R. ; DasGupta,A.
Pub. info.: Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom.  pp.134-139,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4075