1.

Conference Proceedings
Conference Proceedings
1. IN-PLANE RESIDUAL STRESSES IN FILAMENT-EVAPORATED ALUMINUM FILMS ON SINGLE CRYSTAL SILICON WAFERS
Park, Hai-Woong ; Danyluk, Steven
Pub. info.: Advanced electronic packaging materials : symposium held November 27-29, 1989, Boston, Massachusetts, U.S.A..  pp.365-374,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 167
2.

Conference Proceedings
Conference Proceedings
2. Kinetics of Damage Generation on Single-Crystal Silicon Surfaces: The Influence of Lubricant Adsorption
Li, Yuheng ; Danyluk, Steven ; Gunsel, Selda ; Lockwood, Frances
Pub. info.: Surface science investigations in tribology : experimental approaches.  pp.231-,  1992.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 485
3.

Conference Proceedings
Conference Proceedings
3. Nondestructive measurement of in-plane residual stress in silicon strips
Zheng, Tieyu ; Danyluk, Steven
Pub. info.: Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.283-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 591
4.

Conference Proceedings
Conference Proceedings
4. Mechanical Modeling of the 2D Interfacial Slurry Pressure in CMP
Higgs III, C. Fred ; Ng, Sum Huan ; Yoon, Inho ; Shan, Lei ; Yap, Lipkong ; Danyluk, Steven
Pub. info.: Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.305-312,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 767