1.

Conference Proceedings

Conference Proceedings
H. Yang ; J. Kim ; A. Jung ; T. Lee ; D. Yim
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.692239-1-692239-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
2.

Conference Proceedings

Conference Proceedings
J. Kim ; H. Yang ; J. Song ; D. Yim ; T. Hasebe ; M. Yamamoto
Pub. info.: Design for manufacturability through design-process integration.  6521  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
3.

Conference Proceedings

Conference Proceedings
H. Yune ; Y. Ahn ; D. Lee ; J. Moon ; B. Nam ; D. Yim
Pub. info.: Optical microlithography XX.  6520  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
4.

Conference Proceedings

Conference Proceedings
C. Kim ; J. Kim ; J. Choi ; H. Yang ; D. Yim
Pub. info.: Design for manufacturability through design-process integration.  6521  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
5.

Conference Proceedings

Conference Proceedings
B. Cho ; D. Park ; D. Chang ; J. Choi ; C. Kim ; D. Yim ; J. Kim
Pub. info.: Design for manufacturability through design-process integration.  6521  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
6.

Conference Proceedings

Conference Proceedings
C. Park ; J. Hong ; K. Yang ; T. Theeuwes ; F. Gautier ; Y. Min ; A. Chen ; H. Yang ; D. Yim ; J. Kim
Pub. info.: Optical microlithography XX.  6520  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
7.

Conference Proceedings

Conference Proceedings
H. Yang ; J. Kim ; J. Hong ; D. Yim ; T. Hasebe ; M. Yamamoto
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  6518  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518