1.
Conference Proceedings
H. Yang ; J. Kim ; A. Jung ; T. Lee ; D. Yim
Pub. info.:
Metrology, inspection, and process control for microlithography XXII . 2 pp.692239-1-692239-7, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6922
2.
Conference Proceedings
J. Kim ; H. Yang ; J. Song ; D. Yim ; T. Hasebe ; M. Yamamoto
Pub. info.:
Design for manufacturability through design-process integration . 6521 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6521
3.
Conference Proceedings
H. Yune ; Y. Ahn ; D. Lee ; J. Moon ; B. Nam ; D. Yim
Pub. info.:
Optical microlithography XX . 6520 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6520
4.
Conference Proceedings
C. Kim ; J. Kim ; J. Choi ; H. Yang ; D. Yim
Pub. info.:
Design for manufacturability through design-process integration . 6521 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6521
5.
Conference Proceedings
B. Cho ; D. Park ; D. Chang ; J. Choi ; C. Kim ; D. Yim ; J. Kim
Pub. info.:
Design for manufacturability through design-process integration . 6521 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6521
6.
Conference Proceedings
C. Park ; J. Hong ; K. Yang ; T. Theeuwes ; F. Gautier ; Y. Min ; A. Chen ; H. Yang ; D. Yim ; J. Kim
Pub. info.:
Optical microlithography XX . 6520 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6520
7.
Conference Proceedings
H. Yang ; J. Kim ; J. Hong ; D. Yim ; T. Hasebe ; M. Yamamoto
Pub. info.:
Metrology, inspection, and process control for microlithography XXI . 6518 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518