1.

Conference Proceedings

Conference Proceedings
Law, Mark E. ; Jones, Kevin S. ; Radic, Ljubo ; Crosby, Robert ; Clark, Mark ; Gable, Kevin ; Ross, Carrie
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.69-76,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
2.

Conference Proceedings

Conference Proceedings
Crosby, Robert ; Frazer, Jackie ; Jones, K.S. ; Law, M.E. ; Larsen, A. Nylandsted ; Hansen, J. Lundsgaard
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.27-32,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
3.

Conference Proceedings

Conference Proceedings
Thompson, Phillip E. ; Bennett, Joe ; Crosby, Robert ; Twigg, Mark E.
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.87-92,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745