1.

Conference Proceedings
Conference Proceedings
1. Using carbon nanotube cantilevers in scanning probe metrology
Schlaf, R. ; Emirov, Y. ; Bieber, J.A. ; Sikder, A. ; Kohlscheen, J. ; Walters, D.A. ; Islam, M.R. ; Metha, B. ; Ren, Z.F. ; Shofner, T.L. ; Rossie, B.B. ; Cresswell, M.W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.53-57,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings
Conference Proceedings
2. CD reference materials for sub-10th μm applications
Cresswell, M.W. ; Bogardus, E.H. ; de Pinillos, J.V.M. ; Bennett, M.H. ; Allen, R.A. ; Guthrie, W.F. ; Murabito, C.E. ; am Ende, B.A. ; Linholm, L.W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.116-127,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689