1.

Conference Proceedings
Conference Proceedings
1. High flow rate development: process optimization using megasonic immersion development (MID)
Courboin, D. ; Choi, J. W. ; Jung, S. H. ; Baek, S. H. ; Kim, L. J.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.220-233,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
2.

Conference Proceedings
Conference Proceedings
2. Fogging and pattern loading effect by writing strategy
Cho, J.S. ; Baek, S.H. ; Nam, K.H. ; Cho, H.J. ; Courboin, D. ; Jeong, S.H. ; Lee, I.S. ; Shin, C. ; Kim, H.S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.205-216,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
3.

Conference Proceedings
Conference Proceedings
3. Investigations on microloading effect: a parallel approach to PGSD (proximity gap suction development)
Courboin, D. ; Choi, J.W. ; Jung, S.H. ; Baek, S.H. ; Kim, L.-J. ; Ahn, C.N. ; Kim, H.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.106-117,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446