Constantinov, B.I. ; Pasechnic. T.I. ; Bocan, V. ; Kostyukevych, S.A. ; Petrov, M.M.
Pub. info.:
Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA. pp.146-152, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining Technology for Micro-Optics and Nano-Optics. pp.156-163, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining Technology for Micro-Optics and Nano-Optics. pp.144-155, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering