Close infrared thermography using an intensified CCD camera: application in nondestructive high resolution evaluation of electrothermally actuated MEMS [5856-117]
- Author(s):
Serio, B. Hunsinger, J. J. ( FEMTO-ST/CNRS, LPMO (France) ) Conseil, F. Derderian, P. ( MBDA France (France) ) Collard, D. Buchaillot, L. ( Institut d’Electronique de Micro-Electronique et de Nanotechnologie (France) ) Ravat, M. F. ( MBDA France (France) ) - Publication title:
- Optical Measurement Systems for Industrial Inspection IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5856
- Pub. Year:
- 2005
- Pt.:
- 2
- Page(from):
- 819
- Page(to):
- 829
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458568 [0819458562]
- Language:
- English
- Call no.:
- P63600/5856
- Type:
- Conference Proceedings
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