1.

Conference Proceedings
Conference Proceedings
1. Quantum Chemistry: A Review of Ab Initio Methods and Their Use in Predicting Thermochemical Data for CVD Processes
Melius, C.F. ; Allendorf, M.D. ; Colvin, M.E.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1-14,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Thermochemistry of Gas-Phase Species Relevant to Titanium Nitride CVD
Allendorf, M.D. ; Janssen, C.L. ; Colvin, M.E. ; Melius, C.F. ; Nielsen, I.M.B. ; Osterheld, T.H. ; Ho, P.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.393-400,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2