1.

Conference Proceedings
Conference Proceedings
1. Evolution and integration of optimal IC design: performance and manufacturing issues (Invited Paper)
Cole, D.C. ; Baek, S.-Y. ; Zhang, X.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.478-488,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Applications of image diagnostics to metrology quality assurance and process control
Allgair, J.A. ; Boksha, V.V. ; Bunday, B.D. ; Diebold, A.C. ; Cole, D.C. ; Davidson, M.P. ; Hutcheson, J.D. ; Gurnell, A.W. ; Joy, D.C. ; McIntosh, J.M. ; Muckenhirn, S.G. ; Pellegrini, J.C. ; Larrabee, R.D. ; Potzick, J.E. ; Vlada, A.E. ; Smith, N.P. ; Starikov, A. ; Sulivan, N.T. ; Wells, O.C.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.251-277,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
3.

Conference Proceedings
Conference Proceedings
3. Simulation study of process latitude for liquid immersion lithography
Baek, S.-Y. ; Cole, D.C. ; Rothschild, M. ; Switkes, M. ; Yeung, M.S. ; Barouch, E.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1620-1630,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
4.

Conference Proceedings
Conference Proceedings
4. Simulation of the coupled thermal optical effects for liquid immersion micro-/nano-lithography
Baek, S.-Y. ; Wei, A.C. ; Cole, D.C. ; Nellis, G. ; Yeung, M.S. ; Abdo, A.Y. ; Engelstad, R.L.
Pub. info.: Optical Microlithography XVII.  pp.415-427,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377