1.

Conference Proceedings
Conference Proceedings
1. The Impact of Wafer-Level Layer Transfer on High Perfomance Devices and Circuits for 3D IC Fabrication
Guarini, K.W ; Topol, A.W. ; Jeong, M. ; Bernstein, K. ; Xju, K. ; Joshi, R.V. ; Yu, R. ; Ski, L. ; Newport, M.R. ; Singh, D.V. ; Cohen, G.M. ; Pogge, H.B. ; Purushothaman, S. ; Haensch, W.E.
Pub. info.: Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium.  pp.390-404,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-13
2.

Conference Proceedings
Conference Proceedings
2. A Patterned SOI by Masked Anneal for System-On-Chip Applications
Cohen, G.M. ; Sadana, D.K.
Pub. info.: Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A..  pp.53-58,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 686
3.

Conference Proceedings
Conference Proceedings
3. A Self-Aligned Silicide Process Utilizing Ion Implants For Reduced Silicon Consumption And Control Of The Silicide Formation Temperature
Cohen, G.M. ; Cabral, C., Jr. ; Lavoie, C. ; Solomon, P.M. ; Guarini, K.W. ; Chan, K.K. ; Roy, R.A.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.35-40,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
4.

Conference Proceedings
Conference Proceedings
4. A Self-Aligned Silicide Process for Thin Silicon-on-Insulator MOSFETs and Bulk MOSFETs With Shallow Junctions
Cohen, G.M. ; Cabral, C., Jr. ; Lavoie, C. ; Solomon, P.M. ; Guarini, K.W. ; Chan, K.K. ; Roy, R.A.
Pub. info.: Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A..  pp.89-94,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 686
5.

Conference Proceedings
Conference Proceedings
5. Characterization And Monitoring Of Silicon-On-Insulator Fabrication Processes By High-Resolution X-Ray Diffraction
Cohen, G.M. ; Mooney, P.M. ; Park, H. ; Cabral, C., Jr. ; Jones, E.C.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.89-94,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
6.

Conference Proceedings
Conference Proceedings
6. Strained Si-on-Insulator Fabricated From Elastically-Relaxed Si/SiGe Structures
Mooney, P.M. ; Cohen, G.M. ; Chen, H. ; Chu, J.O. ; Klymko, N.
Pub. info.: High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.27-32,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 809