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27 results

Conference Proceedings

1. Defect Evolution in Ion Implanted Silicon

Benton, J.L. ; Libertino, S. ; Eaglesham, D.J. ; Coffa, S.

Pub. info.:	Proceedings of the Fifth International Symposium on High Purity Silicon V. pp.328-340, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-13

Conference Proceedings

2. Ion-Beam-Injected Point Defects in Crystalline Silicon: Migration, Interaction, and Trapping Phenomena

Priolo, F. ; Privitera, V. ; Coffa, S. ; Libertino, S.

Pub. info.:	Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.71-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	439

Conference Proceedings

3. The Effect of Impurity Content and Ion Mass on the Depth Profiles of Vacancy-Type Defects in MeV-Implanted Si

Libertino, S. ; Coffa, S. ; Privitera, V. ; Priolo, F.

Pub. info.:	Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.83-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	439

Conference Proceedings

4. Excitation and De-excitation Processes in Er Implanted Light-Emitting Si Devices

Franzo, G. ; Coffa, S. ; Priolo, F.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.459-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

Conference Proceedings

5. Point Defects Migration and Agglomeration in Si at Room Temperature: The Role of Surface and Impurity Content

Privitera, V. ; Coffa, S. ; Larsen, K. Kyllesbech ; Libertino, S. ; Mannino, G. ; Priolo, F.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.163-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

6. The Effect of the Extra Ion on Residual Damage in MeV-Implanted Si

Libertino, S. ; Benton, J. L. ; Coffa, S. ; Jacobson, D. C. ; Eaglesham, D. J. ; Poate, J. M. ; Lavalle, M. ; Fuochi, P. G.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.187-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

7. Characterization of Interstitial Defect Clusters in Ion-Implanted Si

Benton, J. L. ; Libertino, S. ; Coffa, S. ; Eaglesham, D. J.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.193-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

8. The Role of Cluster Size and Topology on the Ripening of Defect Aggregates in Crystalline Si

Magna, A. La ; Coffa, S. ; Colombo, L.

Pub. info.:	Multiscale modelling of materials : symposium held November 30-December 3, 1998, Boston, Massachusets, U.S.A.. pp.241-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	538

Conference Proceedings

9. Ion-Beam Injected Point Defects in Crystalline Silicon: Migration, Interaction and Trapping Phenomena

Priolo, F. ; Privitera, V. ; Coffa, S. ; Libertino, S.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.53-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

10.

Conference Proceedings

10. The Effect of Impurity Content and Ion Mass on the Depth Profiles of Vacancy-Type Defects in MeV-Implanted Si

Libertino, S. ; Coffa, S. ; Privitera, V. ; Priolo, F.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.65-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

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Author: Coffa, S.